Main Features



1
Stable module pin contact
A top-to-bottom full-travel structure maintains
consistent force during Z-axis descent
and improves contact stability.
2
Non-magnetic material construction
Non-magnetic parts reduce friction and
help prevent equipment malfunction or module damage.
3
Face-up and face-down compatibility
One actuator can support module pin directions
for both face-up and face-down configurations.
4
Spring damper vibration reduction
Spring dampers suppress vertical and
horizontal motion moments for stable process operation.

Specifications



Small Size
Item
Description
A Range55 x 67
Travel Range40 mm
Up-Down Range6 mm
Parallelism0~0.05 mm
Weight0.5 kg
Large Size
Item
Description
A Range70 x 50
Travel Range30 mm
Up-Down Range6 mm
Parallelism0~0.05 mm
Weight0.7 kg
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