Products / Automated Optical Inspection (AOI) / Wafer Inspection (AOI 500)
Automated Optical Inspection
Wafer Inspection (AOI 500)
AOI 500 wafer inspection equipment with inspection and review optics, cameras and light source modules.
Key Features
/ Technical
Built on our core capabilities and differentiated technologies,
we present the key features and technical strengths that deliver new value to our customers.
Automated Optical Inspection
* Click a marker to explore each zone.
1. Mono Camera
Test item
Mono Camera
- Site
- Inspection Site
- Test item
- Mono Camera
2. BF (Bright Field) Light Source
Test item
BF (Bright Field) Light Source
- Site
- Inspection Site
- Test item
- BF Light
3. Tube Lens
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Tube Lens
- Site
- Inspection Site
- Test item
- Tube Lens
4. Nose Piece
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Nose Piece
- Site
- Inspection Site
- Test item
- Nose Piece
5. Porous Chuck
Test item
Porous Chuck
- Site
- Inspection Site
- Test item
- Porous Chuck
6. DF (Dark Field) Light Source
Test item
DF (Dark Field) Light Source
- Site
- Inspection Site
- Test item
- DF Light
7. Color Camera
Test item
Color Camera
- Site
- Review Site
- Test item
- Color Camera
8. BF (Bright Field) Light Source
Test item
BF (Bright Field) Light Source
- Site
- Review Site
- Test item
- BF Light
9. DF (Dark Field) Light Source
Test item
DF (Dark Field) Light Source
- Site
- Review Site
- Test item
- DF Light

Low shipment volumes
Route planning for drivers
Analytics board
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