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Smart Component

Gonio Stage

Smooth Precision Virtual-Axis Rotation Stage

HyVISION Gonio Stage uses a ball-screw-based design to deliver high precision, load capacity and faster drive performance than conventional worm-gear systems.

Main Features

High-Precision Angular Positioning

A precision angular positioning solution for optical alignment, 

angle measurement and high-stability inspection processes.

1

Ball-screw precision drive

Proprietary ball-screw drive technology delivers precision, speed and load-handling performance.

2

Low-friction feeding mechanism

Reduced friction improves repeatability and stable long-term performance.

3

Vision-based pivot measurement

Vision camera-based pivot measurement improves alignment accuracy.

4

Laser displacement correction

Laser displacement sensing enables fine measurement and correction around the pivot center.

5

Pivot center control

Measured data helps accurately control and maintain the pivot center during operation.

6

Concentric control & inspection

Concentric inspection and analysis technology supports high-level quality verification.

Specifications

TitleGonio stage
Table MaterialAluminum
Guiding MechanismCross Roller
Through HoleNo
SensorCW Limit + Home Position + CCW Limit
MotorDefault: 2-phase stepping motor, optional available
Table Surface TreatmentBlack / Alumite
Lead MechanismBall Screw
Stage Thickness52 mm
Goniometer Axis2 Axis (X/Y)
RepeatabilityWithin +/-0.001 degree
Lost MotionWithin 0.003 degree

Application

Optical Alignment

Optical Alignment

Prism and lens angle tuning.
Wafer Inspection

Wafer Inspection

Surface reflection angle control.
Laser Processing

Laser Processing

Beam steering and focusing.
Sensor Calibration

Sensor Calibration

Gyro and tilt sensor testing.
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