Measures microscopic displacement from multiple angles and directions in real time with
nanometer-level resolution for high-end alignment and 3D shape measurement.
5-axis simultaneous measurement
Tilt, position and height can be measured simultaneously using reflected-light structures such as mirror and IRCF targets.
Automatic height error correction
Z-axis height error caused by object tilt is corrected automatically for stable measurement results.
Ultra-compact design
A compact size approximately one-third of competing products supports robot and automation integration.
Multiple interface support
Signal interfaces can be synchronized with module control, power and communication systems.
Integrated telecentric lens
HyVISION telecentric lens technology improves measurement precision and stability.
Custom design support
Measurement range, repeatability and linearity can be customized for specific requirements.
